Advanced Metallization for Ulsi Applications

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Advanced Metallization for Ulsi Applications

T. S. Cale, F. S. Pintchovski

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Kateqoriyalar:

Computers - Programming

İl:

1999

Nəşriyyat:

Materials Research Society

Dil:

english

Səhifələr:

379

ISBN 10:

1558991921

ISBN 13:

9781558991927

Seriyalar:

Materials Research Society

Fayl:

DJVU, 4.68 MB

IPFS:

,

english, 1999

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Bəlkə Sizə maraqlıdır

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G Eranna — Crystal growth and evaluation of silicon for VLSI and ULSI

K. N. Tu, James W. Mayer, J. M. Poate, Lih J. Chen — Advanced Metallization for Future Ulsi: Symposium Held April 8-11, 1996, San Francisco, California, U.S.A.

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Danilo Crippa, Daniel L. Rode and Maurizio Masi (Eds.) — Silicon Epitaxy

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Krishna Seshan，Dominic Schepis — Handbook of Thin Film Deposition (Fourth Edition)

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Stephen A. Campbell — Fabrication Engineering at the Micro- and Nanoscale

Tina L. Lamers, Beth L. Pruitt (auth.), Reza Ghodssi, Pinyen Lin (eds.) — MEMS Materials and Processes Handbook

Y. Shacham-Diamand (auth.), Yosi Shacham-Diamand, Tetsuya Osaka, Madhav Datta, Takayuki Ohba (eds.) — Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications

Krishna Seshan (Author) — Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Geraldine Cogin Shwartz (Author) — Handbook of Semiconductor Interconnection Technology

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Sami Franssila — Introduction to Microfabrication

Geraldine Cogin Schwartz, K.V. Srikrishnan, Arthur Bross — Handbook of Semiconductor Interconnection Technology

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R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi — Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997

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